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Feb 10, 2025
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NMTT 314 - Lithography and Patterning Techniques Class Hours: 3 Lab/Discussion: 2 Credits: 3
Corequisite: NMTT 311 Description: Provides knowledge and hands-on treatment to all aspects of advanced lithography and pattern generation processes, covering topics from substrate preparation to exposure using pattern transfer equipment such as stamping and embossing, ion and e-beam, and optical contact and stepper.
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