Oct 09, 2026  
2026-2027 Undergraduate Catalog 
    
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2026-2027 Undergraduate Catalog
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NANO 314 - Lithography and Patterning Techniques

Class Hours: 3
Lab/Discussion: 2
Credits: 3

Corequisite: NANO 311  
Description: Provides knowledge and hands-on treatment to all aspects of advanced lithography and pattern generation processes, covering topics from substrate preparation to exposure using pattern transfer equipment such as stamping and embossing, ion and e-beam, and optical contact and stepper.


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