NMTT 314 - Lithography and Patterning Techniques

Class Hours: 3
Lab/Discussion: 2
Credits: 3

Corequisite: NMTT 311
Provides knowledge and hands-on treatment to all aspects of advanced lithography and pattern generation processes, covering topics from substrate preparation to exposure using pattern transfer equipment such as stamping and embossing, ion and e-beam, and optical contact and stepper.